Minsk, Belarus, February 06, 2015 - KBTEM-OMO JSC, Republic of Belarus, a leading tool supplier and process solution provider of production line instrumentation for mask fabrication, inspection and repair as well as photolithography tools and GenISys GmbH, a provider of high performance software solution for lithography, announced a cooperation agreement to combine the KBTEM-OMO JSC equipment with advanced data-preparation, simulation and process correction software packages of BEAMER and LAB.
Within the scope of the agreement, GenISys GmbH extends the BEAMERTM software package to import and export data formats of laser scan and microphotosetting pattern generators as well as inspection tools designed and supplied by KBTEM-OMO JSC. Moreover, GenISys GmbH grants a license to KBTEM-OMO JSC in 2015 for the i-line and DUV lithography simulation technology. The companies are also planning to embark on joint design of an improved optical process correction system for the steppers and pattern generators made by KBTEM-OMO JSC.
Combining both companies technologies enables KBTEM-OMO JSC to promote mask fabrication tools far abroad while strengthening the position of GenISys GmbH in the Russian market. New simulation system will contribute to efficient engineering support of photolithography tools supplied by KBTEM-OMO JSC.
The partnership agreement between KBTEM-OMO and GenISys involves a forthcoming joint presentation of integrated process solutions in mask fabrication domain at SEMICON Russia Show in June 2015.
Based in Munich, Germany, with offices in Tokyo, Japan, and Santa Clara, Calif., GenISys GmbH develops, markets and supports flexible, high-performance software solutions for the optimization of microstructure fabrication processes. Addressing the market for e-beam direct-write and optical lithography, GenISys combines deep technical expertise in layout data processing, process modeling, correction and optimization with high-caliber software engineering and a focus on ease of use. GenISys products give researchers, IC and MEMS manufacturers and system suppliers unparalleled efficiency, ease of use and optimal value in research, development and production of new micro-patterning technologies.
KBTEM-OMO JSC is the Belarus-based scientific and technical group of dedicated designers, technicians and production engineers which manufactures the high tech optical and mechanical equipment for microelectronics using the most advanced technology and synthesis of the latest scientific achievements in various areas. The products’ portfolio of the company includes R&D and manufacturing of advanced optical based solutions for photomask and wafer fabrication, special opto-mechanical process, inspection and measurement equipment, optical and mechanical production, devices, devices and certification services in the area of electromagnetic compatibility
For more information visit us as at www.kb-omo.by
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