ProSEM Features include: 

Automated Edge Finding Algorithms

  • Sigmoidal Fit
  • Maximum Derivative
  • Signal Peak
  • Baseline Regression

Visualization

  • SEM Image
  • 1-D Cross section plots
  • Measurement details overlaid
  • Power Spectral Density (PSD)

Pixel Size Calibration (Image Scaling) by

  • SEM meta-data 
  • SEM scale bar
  • Grating Period Measurement
  • Manual

Feature Types

  • Line / Trench
  • Pillar / Hole
  • Circle
  • Ellipse
  • Rectangle
  • 1-Dimensional Grating
  • 2-Dimensional Array

Multiple Features in an Image

  • Define and Measure Unlimited Features in an Image
  • Same Feature Type or Mixed Feature Types
  • Automation
  • Automatically Find all Similar Features in an Image
  • Automatically Measure a full set of Imaages with Similar Features

Line Edge Roughness

  • 3-sigma LER
  • Power Spectral Density (PSD) Plot
  • Correlation Length
  • Roughness Exponent

Data Handling

  • Results in table format, with all input settings
  • User Variables
  • Export to CSV
  • Summarize data by any user-variable or attribute
  • Data Filtering for Outlier Removal

Platform Support

  • Windows 7/ 8 / 10 64-bit
  • Linux 64: Redhat 5.4+,Ubuntu 14.04+

ProSEM Brochure (PDF)

 

User Interface Features:

Edge Detection Options:

Feature Types:

Line Edge Roughness / Power Spectral Density:

Multiple Regions:

 

Feature Find: 

Batch Mode: