Enhancing 3-D structural variety by combination of electron-beam and nanoimprint lithography with thermal reflow

A. Schleunitz, V. Guzenko, C. Spreu, M. Vogler, H. Atasoy, G. Gruetzner and H. Schift.
37th International Conference on Micro- and Nano-Engineering (MNE2011), Berlin, Germany, September 19-23, 2011, P-LITH-071
(Best Poster Award Winner in category Lithography and Systems)