logo-icon-genisys

Publications

Duplikat von Computational algorithms for optimizing mask layouts in proximity printing

K. Motzek, U. Vogler, M. Hennemeyer, M. Hornung, R. Voelkel, A. Erdmann, B. Meliorisz
Microelectronic Engineering, Volume 88, Issues 8, August 2011, Pages 2066-2069

http://www.sciencedirect.com/science/article/pii/S0167931710004752